author:Oyo Butsuri Gakkai

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Proceedings of 1st International Conference on Electronic Materials Tokyo, June 1988: New Materials and New Physical Phenomena for Electronics of the 21st Century (Icem'88), June 13-15, 1988, Shigaku-Kaikan, Tokyo, Japan

International Conference on Electronic Materials 1988 (Tokyo, Japan)／Sugano, Takuo／Oyo Butsuri Gakkai／Materials Research Society

1997 2nd International Symposium on Plasma Process-Induced Damage, Pip: 13-14 May 1997, Monterey, California, USA

International Symposium on Plasma Process-Induced Damage (2nd : 1997 : Monterey, Calif.)／Cheung, Kin P.／Nakamura, Moritaka／Gabriel, Calvin T.／American Vacuum Society／Oyo Butsuri Gakkai

Optical Engineering for Sensing and Nanotechnology (Icosn `99): Proceedings of Spie 16-18 June 1999 Yokohama, Japan (Proceedings of Spie, Volume 3740)

Yamaguchi, Ichirou／Nihon Kogakkai (Oyo Butsuri Gakkai)／Society of Photo-Optical Instrumentation Engineers／Icosn 9 (1999 Yokohama-Shi, Japan)

Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan

Naoaki Aizaki, editor ; sponsored by Photomask Japan, BACUS, SPIE--the International Society for Optical Engineering ; supporting societies, the Japan Society of Applied Physics ... [et al.] ; published by SPIE--the International Society for Optical Engineering