Characterization and Metrology for Ulsi Technology 2003: International Conference on Characterization and Metrology for Ulsi Technology, Austin, Texas 24-28 March 2003 (Aip Conference Proceedings)
Seiler, David G./Diebold, Alain C./Shaffner, T. J./McDonald, Robert/Zollner, Stefan/INTERNATIONAL CONFERENCE ON CHARACTERIZA/Diebold, Alain C./Shaffner, T. J./McDonald, Robert/Zollner, Stefan/Khosla, Rajinder P./Secula, Eric M./Seiler, David G.