author:International Symposium on Plasma Process-Induced Damage (2nd : 1997 : Monterey, Calif.)

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1997 2nd International Symposium on Plasma Process-Induced Damage, Pip: 13-14 May 1997, Monterey, California, USA

International Symposium on Plasma Process-Induced Damage (2nd : 1997 : Monterey, Calif.)／Cheung, Kin P.／Nakamura, Moritaka／Gabriel, Calvin T.／American Vacuum Society／Oyo Butsuri Gakkai

2003 8th International Symposium on Plasma- and Process-Induced Damage, April 24-25, 2003, Corbeil-Essonnes, France

Koji Eriguchi, S. Krishnan, and Terence Hook, editors

2002 7th International Symposium on Plasma- and Process-Induced Damage

Terence Hook, Koji Eriguchi, and Calvin T. Gabriel, editors

2001 6th International Symposium on Plasma- and Process-Induced Damage, May 13-15, 2001, Monterey, California, USA

Manfred Engelhardt, Terence Hook, and Calvin T. Gabriel, ; technical co-sponsors, American Vacuum Society, IEEE/Electron Devices Society, Japanese Society of Applied Physics

1999 4th International Symposium on Plasma Process-Induced Damage, May 9-11, 1999, Monterey, California, USA

editors, Thuy Dao, Mitsumasa Koyanagi, Terence Hook ; technical co-sponsors,IEEE/Electron Devices Society, American Vacuum Society, Japan Society of Applied Physics