M. Edward Motamedi, Wayne Bailey, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology
Wayne Bailey, M. Edward Motamedi, Fang-Chen Luo, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering