Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications (Topics in Applied Physics)
Behrisch, Rainer/Wittmaack, Klaus/Behrisch, R./Hauffe, W./Hofer, W.O./Laegreid, N./McClanahan, E.D./Sundqvist, B.U.R./Wittmaack, K.