Chemical Vapour Deposition: Precursors, Processes and Applications
Pemble, Martyn E／Parkin, Ivan P／Fischer, Ronald A／Gladfelter, Wayne L／Ritala, Mikko／Chalker, Paul／Dupuis, Russell D／Irvine, Stuart J C／Krumdieck, Susan／Parala, Harish／Palgrave, Robert／Leese, Barry／Aspinall, H／Niinisto, Jaako／Kanjolia, Ravi／Alexandrov, S E／Hitchman, Michael L／Jones, Anthony C
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