Materials Science of Microelectromechanical Systems (MEMS) Devices IV: Volume 687 (MRS Proceedings)

出版社: Cambridge University Press(2002-05-23)

ハードカバー: 334 ページ / 15.9 x 1.9 x 22.9 cm

ISBN-10: 1558996230  ISBN-13: 9781558996236